Supplementary Data for: Optimization of grayscale lithography for the fabrication of Flat Diffractive Infrared Lenses on Silicon Wafers
Images and data acquired during the experiment and presented in the article.
Funding
Norwegian Micro- and Nano-Fabrication Facility (NORFAB)
The Research Council of Norway
Find out more...Novel IR Imager for Enabling and Emerging Applications
The Research Council of Norway
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